New chemical edge isolation tool from Manz offers higher process stability

Manz showcased its new equipment for wet-chemical processing of crystalline silicon solar cells at SNEC 2012 in Shanghai this May. The IPSG CEI 4800 is designed for chemical edge isolation (CEI) and phosphor silicate glass (PSG) post process removal. The tool is capable of handing 4800 wafers per hour and sold as a bundle with the Manz SpeedPicker for loading and unloading.

New chemical edge isolation tool from Manz offers higher process stability

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